Inventories, net (Details) (USD $)	6 Months Ended			3 Months Ended	6 Months Ended
	Jun. 30, 2014	Jun. 30, 2013	Dec. 31, 2013	Jun. 30, 2013 Dry Strip Product Line [Member]	Jun. 30, 2013 Dry Strip Product Line [Member] mm
Inventories, net
Raw materials	$ 63,103,000		$ 56,942,000
Work in process	31,893,000		27,462,000
Finished goods (completed systems)	11,654,000		11,385,000
Inventories, net	106,650,000		95,789,000
Inventory reserves	24,300,000		25,100,000
Inventories, net
Charge to cost of sales relating to inventory	$ 244,000	$ 2,370,000		$ 0	$ 2,100,000
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)					300