Inventories, net (Tables)

3 Months Ended

Mar. 31, 2014

Inventories, net

Schedule of components of inventories

	March 31,		December 31,
	2014		2013
	(in thousands)
Raw materials	$	57,809	$	56,942
Work in process	29,064		27,462
Finished goods (completed systems)	$	8,660	11,385
	$	95,533	$	95,789