Inventories, net (Tables)

9 Months Ended

Sep. 30, 2013

Inventories, net

Schedule of components of inventories

	September 30,		December 31,
	2013		2012
	(in thousands)
Raw materials	$	58,265	$	72,013
Work in process	22,622		12,253
Finished goods (completed systems)	13,429		15,968
	$	94,316	$	100,234