Inventories, net (Tables)

3 Months Ended

Mar. 31, 2013

Inventories, net

Schedule of components of inventories

	March 31,		December 31,
	2013		2012
	(in thousands)
Raw materials	$	65,550	$	72,013
Work in process	17,139		12,253
Finished goods (completed systems)	16,040		15,968
	$	98,729	$	100,234