Subsequent Events (Details) (Subsequent event, USD $) In Millions, unless otherwise specified	3 Months Ended	6 Months Ended
Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012 Minimum	Jun. 30, 2012 Maximum
Subsequent events
Expected savings to be generated due to cost out initiatives			$ 4	$ 8
Employee termination benefits and other related costs	$ 0.5	$ 0.5

Represents the costs related to employee termination benefits and other related costs, such as pension expense and contributions, other postretirement benefits, expenses and payments.

No definition available.

Name:	acls_EmployeeTerminationBenefitsAndOtherRelatedCosts
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration