Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001104659-26-020461
Filing Date
2026-02-26
Accepted
2026-02-26 15:48:26
Documents
117
Period of Report
2025-12-31

Document Format Files

Seq Description Document Type Size
1 10-K acls-20251231x10k.htm   iXBRL 10-K 3058607
2 EX-10.1 acls-20251231xex10d1.htm EX-10.1 81135
3 EX-10.7 acls-20251231xex10d7.htm EX-10.7 26757
4 EX-10.8 acls-20251231xex10d8.htm EX-10.8 14443
5 EX-14.1 acls-20251231xex14d1.htm EX-14.1 35697
6 EX-21.1 acls-20251231xex21d1.htm EX-21.1 7218
7 EX-23.1 acls-20251231xex23d1.htm EX-23.1 7276
8 EX-31.1 acls-20251231xex31d1.htm EX-31.1 13159
9 EX-31.2 acls-20251231xex31d2.htm EX-31.2 14184
10 EX-32.1 acls-20251231xex32d1.htm EX-32.1 6141
11 EX-32.2 acls-20251231xex32d2.htm EX-32.2 7481
12 GRAPHIC acls-20251231xex14d1001.jpg GRAPHIC 8873
  Complete submission text file 0001104659-26-020461.txt   14279947

Data Files

Seq Description Document Type Size
13 EX-101.SCH acls-20251231.xsd EX-101.SCH 77726
14 EX-101.CAL acls-20251231_cal.xml EX-101.CAL 127074
15 EX-101.DEF acls-20251231_def.xml EX-101.DEF 306993
16 EX-101.LAB acls-20251231_lab.xml EX-101.LAB 757935
17 EX-101.PRE acls-20251231_pre.xml EX-101.PRE 557040
120 EXTRACTED XBRL INSTANCE DOCUMENT acls-20251231x10k_htm.xml XML 2996404
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 26687324
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)