Gain on Sale of Dry Strip Assets and Intellectual Property (Details) $ in Thousands		12 Months Ended
	Dec. 03, 2012 USD ($) mm	Dec. 31, 2013 USD ($)
Sale of assets
Gain on sale of dry strip assets and intellectual property		$ 1,167
Dry strip assets and intellectual property
Sale of assets
Purchase price	$ 10,700
Contingent purchase price	$ 2,000
Gain on sale of dry strip assets and intellectual property		$ 1,200
Period Through September 2013 | Dry strip assets and intellectual property
Sale of assets
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters) | mm	300
Period Through December 2015 | Dry strip assets and intellectual property
Sale of assets
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters) | mm	200