Business Segment and Geographic Region Information (Tables)

12 Months Ended

Dec. 31, 2015

Business Segment and Geographic Region Information

Schedule of revenue by product lines

	Years ended December 31,
	2015		2014		2013
	(in thousands)
Ion implantation systems, services, and royalties	$	282,624	$	183,148	$	164,030
Other systems and services		18,871		19,903		31,602
	$	301,495	$	203,051	$	195,632

Schedule of revenue and long-lived assets by geographic region

	Revenue		Long-Lived Assets
	(in thousands)
2015
United States	$	226,890	$	41,729
Europe		24,209		—
Asia Pacific		50,396		334
	$	301,495	$	42,063
2014
United States	$	126,255	$	40,001
Europe		29,140		—
Asia Pacific		47,656		299
	$	203,051	$	40,300
2013
United States	$	116,969	$	44,424
Europe		27,933		—
Asia Pacific		50,730		480
	$	195,632	$	44,904