Schedule II-Valuation and Qualifying Account

12 Months Ended

Dec. 31, 2015

Schedule II-Valuation and Qualifying Accounts

Schedule II-Valuation and Qualifying Accounts

Schedule II—Valuation and Qualifying Accounts
Axcelis Technologies, Inc.
(In thousands)

	Balance at Beginning of Period		Charged to Costs and Expenses		Deductions			Other(*)			Balance at End of Period
Year Ended December 31, 2015
Allowance for doubtful accounts and returns(**)	$	390	$	—	$	(390	)	$	—		$	—
Reserve for excess and obsolete inventory(***)		23,642		1,185		(14,362	)		—			10,465
Year Ended December 31, 2014
Allowance for doubtful accounts and returns	$	404	$	—	$	—		$	(14	)	$	390
Reserve for excess and obsolete inventory(**)		25,091		1,003		(2,452	)		—			23,642
Year Ended December 31, 2013
Allowance for doubtful accounts and returns	$	305	$	96	$	—		$	3		$	404
Reserve for excess and obsolete inventory(***)		33,601		2,562		(10,913	)		(159	)		25,091

(*)	Represents foreign currency translation adjustments.
(**)	Deductions include the write-off of accounts receivable.
(***)	Deductions include the disposal and sale of fully reserved inventory