XML 12 R70.htm IDEA: XBRL DOCUMENT v2.4.1.9
Income Taxes (Details 4) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Tax credit carryforwards      
Interest and penalty expense recognized related to unrecognized tax benefits $ 200,000us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense $ 200,000us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense $ 200,000us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense
Reconciliation of the beginning and ending balance of unrecognized tax benefits      
Balance at beginning of year 7,645,000us-gaap_UnrecognizedTaxBenefits 7,719,000us-gaap_UnrecognizedTaxBenefits  
Increases in unrecognized tax benefits as a result of tax positions taken during a prior period 92,000us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions 324,000us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions  
Increases in unrecognized tax benefits as a result of tax positions taken during the current period 223,000us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions    
Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations   (398,000)us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations  
Balance at end of year 7,960,000us-gaap_UnrecognizedTaxBenefits 7,645,000us-gaap_UnrecognizedTaxBenefits 7,719,000us-gaap_UnrecognizedTaxBenefits
Recorded as other long-term liability 2,328,000acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability 2,343,000acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability  
Recorded as a decrease in deferred tax assets and offsetting valuation allowance 5,632,000acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance 5,302,000acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance  
Unrecognized tax benefits 7,960,000us-gaap_UnrecognizedTaxBenefits 7,645,000us-gaap_UnrecognizedTaxBenefits 7,719,000us-gaap_UnrecognizedTaxBenefits
Research and development and other tax credit carryforwards      
Tax credit carryforwards      
Tax credit carryforwards 18,100,000us-gaap_TaxCreditCarryforwardAmount
/ us-gaap_TaxCreditCarryforwardAxis
= acls_ResearchDevelopmentAndOtherTaxCreditMember
   
Foreign      
Tax credit carryforwards      
Tax credit carryforwards $ 3,900,000us-gaap_TaxCreditCarryforwardAmount
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_ForeignCountryMember