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Income Taxes (Details 3) (USD $)
In Millions, unless otherwise specified
Dec. 31, 2014
Federal and state  
Operating loss carryforwards  
Net operating loss carryforwards $ 346.9us-gaap_OperatingLossCarryforwards
/ us-gaap_IncomeTaxAuthorityAxis
= acls_FederalAndStateMember
Foreign  
Operating loss carryforwards  
Net operating loss carryforwards $ 4.3us-gaap_OperatingLossCarryforwards
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_ForeignCountryMember