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Income Taxes (Details) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Income (loss) before income taxes      
United States $ (11,987,000)us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic $ (18,998,000)us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic $ (37,682,000)us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
Foreign 1,820,000us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign 2,894,000us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign 5,294,000us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
Loss before income taxes (10,167,000)us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest (16,104,000)us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest (32,388,000)us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
Current:      
State 59,000us-gaap_CurrentStateAndLocalTaxExpenseBenefit 84,000us-gaap_CurrentStateAndLocalTaxExpenseBenefit 82,000us-gaap_CurrentStateAndLocalTaxExpenseBenefit
Foreign 780,000us-gaap_CurrentForeignTaxExpenseBenefit 641,000us-gaap_CurrentForeignTaxExpenseBenefit 738,000us-gaap_CurrentForeignTaxExpenseBenefit
Total current 839,000us-gaap_CurrentIncomeTaxExpenseBenefit 725,000us-gaap_CurrentIncomeTaxExpenseBenefit 820,000us-gaap_CurrentIncomeTaxExpenseBenefit
Deferred:      
Foreign 260,000us-gaap_DeferredForeignIncomeTaxExpenseBenefit 315,000us-gaap_DeferredForeignIncomeTaxExpenseBenefit 826,000us-gaap_DeferredForeignIncomeTaxExpenseBenefit
Total deferred 260,000acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation 315,000acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation 826,000acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation
Income tax provision 1,099,000us-gaap_IncomeTaxExpenseBenefit 1,040,000us-gaap_IncomeTaxExpenseBenefit 1,646,000us-gaap_IncomeTaxExpenseBenefit
Reconciliations of income taxes at the United States Federal statutory rate to the effective income tax rate      
Income tax benefit at the United States statutory rate (3,558,000)us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate (5,636,000)us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate (11,336,000)us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate
State income taxes 38,000us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes 55,000us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes 53,000us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes
Unrecognized tax benefits 184,000acls_IncomeTaxReconciliationUnrecognizedTaxBenefits (293,000)acls_IncomeTaxReconciliationUnrecognizedTaxBenefits (832,000)acls_IncomeTaxReconciliationUnrecognizedTaxBenefits
Effect of change in valuation allowance (6,835,000)us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance 5,975,000us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance 12,662,000us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance
Foreign income tax rate differentials 259,000us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential (1,244,000)us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential (788,000)us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential
Unremitted earnings of foreign subsidiaries (758,000)acls_IncomeTaxReconciliationUnremittedEarningsOfForeignSubsidiaries 961,000acls_IncomeTaxReconciliationUnremittedEarningsOfForeignSubsidiaries  
Foreign dividend     383,000us-gaap_IncomeTaxReconciliationRepatriationOfForeignEarnings
Stock options 686,000us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost 450,000us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost 1,298,000us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost
Deemed distribution from foreign subsidiaries 607,000acls_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries 316,000acls_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries 149,000acls_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries
Discrete items, net 9,143,000us-gaap_IncomeTaxReconciliationOtherReconcilingItems    
Other, net 1,333,000us-gaap_IncomeTaxReconciliationOtherAdjustments 456,000us-gaap_IncomeTaxReconciliationOtherAdjustments 57,000us-gaap_IncomeTaxReconciliationOtherAdjustments
Income tax provision 1,099,000us-gaap_IncomeTaxExpenseBenefit 1,040,000us-gaap_IncomeTaxExpenseBenefit 1,646,000us-gaap_IncomeTaxExpenseBenefit
Significant components of current deferred income taxes      
Accrued compensation 65,000acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent 43,000acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent  
Inventories 9,808,000acls_DeferredTaxAssetsInventoryCurrent 16,540,000acls_DeferredTaxAssetsInventoryCurrent  
Warranty 486,000acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent 591,000acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent  
Other 1,620,000acls_DeferredTaxAssetsOtherCurrent 2,671,000acls_DeferredTaxAssetsOtherCurrent  
Deferred taxes, gross 11,979,000acls_DeferredTaxAssetsLiabilitiesGrossCurrent 19,845,000acls_DeferredTaxAssetsLiabilitiesGrossCurrent  
Valuation allowance (10,975,000)us-gaap_DeferredTaxAssetsValuationAllowanceCurrent (18,059,000)us-gaap_DeferredTaxAssetsValuationAllowanceCurrent  
Deferred taxes, net 1,004,000us-gaap_DeferredTaxAssetsLiabilitiesNetCurrent 1,786,000us-gaap_DeferredTaxAssetsLiabilitiesNetCurrent  
Significant components of long-term deferred income taxes      
Federal net operating loss carryforwards 105,119,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsDomestic 104,370,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsDomestic  
State net operating loss carryforwards 2,210,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal 2,250,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal  
Foreign net operating loss carryforwards 1,280,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign 1,421,000us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign  
Unremitted earnings of foreign subsidiaries (8,800,000)us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings (9,661,000)us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings  
Intangible assets 383,000acls_DeferredTaxAssetsIntangibleAssetsNoncurrent 532,000acls_DeferredTaxAssetsIntangibleAssetsNoncurrent  
Property, plant and equipment 4,548,000us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment 4,796,000us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment  
Stock compensation 5,198,000us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost 4,896,000us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost  
Warranty   (56,000)acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent  
Other (2,328,000)acls_DeferredTaxAssetsOtherNoncurrent (2,406,000)acls_DeferredTaxAssetsOtherNoncurrent  
Deferred taxes, gross 129,572,000acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent 129,499,000acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent  
Valuation allowance (128,982,000)us-gaap_DeferredTaxAssetsValuationAllowanceNoncurrent (129,409,000)us-gaap_DeferredTaxAssetsValuationAllowanceNoncurrent  
Deferred taxes, net 590,000us-gaap_DeferredTaxAssetsLiabilitiesNetNoncurrent 90,000us-gaap_DeferredTaxAssetsLiabilitiesNetNoncurrent  
Deferred tax assets 141,600,000us-gaap_DeferredTaxAssetsLiabilitiesNet    
United States      
Tax credit carryforwards      
Tax credit carryforwards 16,669,000us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_DomesticCountryMember
17,814,000us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_DomesticCountryMember
 
State      
Tax credit carryforwards      
Tax credit carryforwards $ 5,293,000us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_StateAndLocalJurisdictionMember
$ 5,543,000us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness
/ us-gaap_IncomeTaxAuthorityAxis
= us-gaap_StateAndLocalJurisdictionMember