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Employee Benefit Plans (Details 2) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Classification of liabilities in the Consolidated Balance Sheets      
Current liabilities $ 837,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities $ 638,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities  
Total liabilities 4,160,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent 4,054,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent  
Plan expenses 700,000us-gaap_DefinedBenefitPlanAdministrationExpenses 600,000us-gaap_DefinedBenefitPlanAdministrationExpenses 600,000us-gaap_DefinedBenefitPlanAdministrationExpenses
Accrued compensation      
Classification of liabilities in the Consolidated Balance Sheets      
Current liabilities 837,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities
/ us-gaap_BalanceSheetLocationAxis
= acls_AccruedCompensationMember
638,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities
/ us-gaap_BalanceSheetLocationAxis
= acls_AccruedCompensationMember
 
Other long-term liabilities      
Classification of liabilities in the Consolidated Balance Sheets      
Long-term liabilities $ 3,323,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent
/ us-gaap_BalanceSheetLocationAxis
= acls_OtherPlanLiabilitiesMember
$ 3,416,000us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent
/ us-gaap_BalanceSheetLocationAxis
= acls_OtherPlanLiabilitiesMember