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Summary of Significant Accounting Policies (Details 2)
 12 Months Ended
Dec. 31, 2014
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Dec. 31, 2013
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Dec. 31, 2012
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Revenue | Customer concentration risk      
Concentration of risk      
Number of customers 2acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember		 1acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember		 1acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
Revenue | Customer concentration risk | Ten largest customers      
Concentration of risk      
Number of customers 10acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_TenLargestCustomersMember		 10acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_TenLargestCustomersMember		 10acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_TenLargestCustomersMember
Percentage of concentration risk 68.10%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_TenLargestCustomersMember		 69.10%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_TenLargestCustomersMember		 70.60%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_TenLargestCustomersMember
Revenue | Customer concentration risk | One customer      
Concentration of risk      
Percentage of concentration risk 17.40%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_LargestCustomerMember		 15.50%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_LargestCustomerMember		 18.20%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_LargestCustomerMember
Revenue | Customer concentration risk | Second customer      
Concentration of risk      
Percentage of concentration risk 12.30%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_SecondLargestCustomerMember		    
Consolidated accounts receivable | Credit concentration risk      
Concentration of risk      
Number of customers 2acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember		 3acls_ConcentrationRiskNumberOfCustomers
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember		  
Consolidated accounts receivable | Credit concentration risk | One customer      
Concentration of risk      
Percentage of concentration risk 21.70%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_LargestCustomerMember		 23.20%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_LargestCustomerMember		  
Consolidated accounts receivable | Credit concentration risk | Second customer      
Concentration of risk      
Percentage of concentration risk 20.40%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_SecondLargestCustomerMember		 14.20%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_SecondLargestCustomerMember		  
Consolidated accounts receivable | Credit concentration risk | Third customer      
Concentration of risk      
Percentage of concentration risk   13.60%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_AccountsReceivableMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CreditConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= acls_ThirdLargestCustomerMember