Schedule II-Valuation and Qualifying Account

12 Months Ended

Dec. 31, 2014

Schedule II-Valuation and Qualifying Accounts

Schedule II-Valuation and Qualifying Accounts

Schedule II—Valuation and Qualifying Accounts
Axcelis Technologies, Inc.
(In thousands)

	Balance at Beginning of Period		Charged to Costs and Expenses		Deductions(**)			Other(*)			Balance at End of Period
Year Ended December 31, 2014
Allowance for doubtful accounts and returns	$	404	$	—	$	—		$	(14	)	$	390
Reserve for excess and obsolete inventory(**)		25,091		1,003		(2,452	)		—			23,642
Year Ended December 31, 2013
Allowance for doubtful accounts and returns	$	305	$	96	$	—		$	3		$	404
Reserve for excess and obsolete inventory(**)		33,601		2,562		(10,913	)		(159	)		25,091
Year Ended December 31, 2012
Allowance for doubtful accounts and returns	$	411	$	—	$	(112	)	$	6		$	305
Reserve for excess and obsolete inventory		22,778		14,492		(4,819	)		1,150			33,601

(*)	Represents foreign currency translation adjustments.
(**)	Deductions include the disposal and sale of fully reserved inventory.