Business Segment and Geographic Region Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2013 item	Dec. 31, 2012	Dec. 31, 2011
Business Segment and Geographic Region Information
Number of business segments									1
Revenue by product lines
Revenue	$ 58,574	$ 48,831	$ 47,501	$ 40,726	$ 44,624	$ 44,640	$ 59,114	$ 55,007	$ 195,632	$ 203,385	$ 319,416
Ion implantation systems, services, and royalties
Revenue by product lines
Revenue									164,030	156,090	237,857
Other systems and services
Revenue by product lines
Revenue									$ 31,602	$ 47,295	$ 81,559