Inventories, net (Details) (USD $)	3 Months Ended	12 Months Ended		3 Months Ended		12 Months Ended
	Mar. 31, 2013 mm	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2013 Inventory reserves	Dec. 31, 2012 Inventory reserves	Dec. 31, 2013 Inventory reserves	Dec. 31, 2012 Inventory reserves	Dec. 31, 2011 Inventory reserves
Inventories, net
Raw materials		$ 56,942,000	$ 72,013,000
Work in process		27,462,000	12,253,000
Finished goods (completed systems)		11,385,000	15,968,000
Inventories, net		95,789,000	100,234,000
Inventory reserves	2,100,000	25,100,000	33,600,000
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)	300
Valuation and Qualifying Accounts
Increase in inventory reserves					13,400,000	2,562,000	14,492,000	1,015,000
Cost of sales due to below normal production capacity		600,000	2,600,000
Decrease in inventory reserves				$ 8,700,000		$ 10,913,000	$ 4,819,000	$ 5,583,000