Gain on Sale of Dry Strip Assets and Intellectual Property (Details) (USD $)	3 Months Ended		12 Months Ended					12 Months Ended
	Jun. 30, 2013	Mar. 31, 2013 mm	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2013 Dry strip product line, intellectual property rights and certain assets	Dec. 31, 2012 Dry strip product line, intellectual property rights and certain assets	Dec. 03, 2012 Dry strip product line, intellectual property rights and certain assets	Dec. 31, 2013 Dry strip product line, intellectual property rights and certain assets Period through September 2013 mm	Dec. 31, 2013 Dry strip product line, intellectual property rights and certain assets Period through December 2015 mm
Sale of assets
Purchase price							$ 10,700,000
Contingent purchase price							2,000,000
Gain on sale of dry strip assets and intellectual property	800,000	400,000	1,167,000	7,904,000	1,200,000	7,900,000
Proceeds			1,200,000	8,716,000
Offset against proceeds, product and material costs relating to assets sold						$ 800,000
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)		300						300	200