Nature of Business (Details) (USD $)	1 Months Ended	12 Months Ended
	Sep. 30, 2013 mm	Dec. 31, 2013	Dec. 31, 2012	Dec. 03, 2012 Dry strip product line, intellectual property rights and certain assets	Jun. 30, 2013 Maximum
Sale of assets
Proceeds from sale of dry strip assets and intellectual property		$ 1,200,000	$ 8,716,000
Size of dry strip wafer processing equipment (in millimeters)	300
Contingent purchase price				$ 2,000,000	$ 2,000,000