Business Segment and Geographic Region Information (Tables)

12 Months Ended

Dec. 31, 2013

Business Segment and Geographic Region Information

Schedule of revenue by product lines

	Years ended December 31,
	2013		2012		2011
	(in thousands)
Ion implantation systems, services, and royalties	$	164,030	$	156,090	$	237,857
Other systems and services		31,602		47,295		81,559
	$	195,632	$	203,385	$	319,416

Schedule of revenue and long-lived assets by geographic region

	Revenue		Long-Lived Assets
	(in thousands)
2013
United States	$	116,969	$	44,424
Europe		27,933		—
Asia Pacific		50,730		480
		195,632	$	44,904
2012
United States	$	132,159	$	43,440
Europe		27,636		—
Asia Pacific		43,590		752
	$	203,385	$	44,192
2011
United States	$	234,123	$	54,472
Europe		31,505		—
Asia Pacific		53,779		996
	$	319,416	$	55,468