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Inventories, net (Tables)
 12 Months Ended
Dec. 31, 2013
Inventories, net  
Schedule of components of inventories

 

 

 
   December 31,  
 
   2013   2012  
 
   (in thousands)
  

Raw materials

   $ 56,942   $ 72,013  

Work in process

     27,462     12,253  

Finished goods (completed systems)

     11,385     15,968  
           
​ ​ ​ ​ ​ ​ ​ ​

 

   $ 95,789   $ 100,234  
           
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