Schedule II-Valuation and Qualifying Accounts

12 Months Ended

Dec. 31, 2013

Schedule II-Valuation and Qualifying Accounts

Schedule II-Valuation and Qualifying Accounts

Schedule II—Valuation and Qualifying Accounts
Axcelis Technologies, Inc.
(In thousands)

	Balance at Beginning of Period		Charged to Costs and Expenses			Deductions			Other(*)			Balance at End of Period
Year Ended December 31, 2013
Allowance for doubtful accounts and returns	$	305	$	96		$	—		$	3		$	404
Reserve for excess and obsolete inventory(**)		33,601		2,562			(10,913	)		(159	)		25,091
Year Ended December 31, 2012
Allowance for doubtful accounts and returns	$	411	$	—		$	(112	)	$	6		$	305
Reserve for excess and obsolete inventory		22,778		14,492			(4,819	)		1,150			33,601
Year Ended December 31, 2011
Allowance for doubtful accounts and returns	$	1,357	$	(535	)	$	(449	)	$	38		$	411
Reserve for excess and obsolete inventory		27,517		1,015			(5,583	)		(171	)		22,778

(*)

Represents foreign currency translation adjustments.

(**)

Deductions include the disposal of fully reserved inventory