Schedule II-Valuation and Qualifying Accounts

12 Months Ended

Dec. 31, 2011

Schedule II-Valuation and Qualifying Accounts

Schedule II-Valuation and Qualifying Accounts

Schedule II—Valuation and Qualifying Accounts
Axcelis Technologies, Inc.
(In thousands)

	Balance at Beginning of Period		Charged to Costs and Expenses			Deductions			Other(*)			Balance at End of Period
Year Ended December 31, 2011
Allowance for doubtful accounts and returns	$	1,357	$	(535	)	$	(449	)	$	38		$	411
Reserve for excess and obsolete inventory		27,517		1,015			(5,583	)		(171	)		22,778
Year Ended December 31, 2010
Allowance for doubtful accounts and returns	$	2,390	$	(1,120	)	$	(17	)	$	104		$	1,357
Reserve for excess and obsolete inventory		36,980		2,015			(11,224	)		(254	)		27,517
Year Ended December 31, 2009
Allowance for doubtful accounts and returns	$	2,545	$	(88	)	$	—		$	(67	)	$	2,390
Reserve for excess and obsolete inventory		47,656		9,818			(20,732	)		238			36,980

(*)

Represents foreign currency translation adjustments.