X0303 4 2011-02-07 0001102934 CABOT MICROELECTRONICS CORP CCMP 0001509949 Naman Ananth C/O CABOT MICROELECTRONICS CORPORATION 870 COMMONS DRIVE AURORA IL 60504 1 VP, Research & Development Common Stock 2011-02-07 4 S 0 1442 46.7599 D 3162.78 D Common Stock 2011-02-07 4 M 0 450 31.57 A 3612.78 D Common Stock 2011-02-07 4 S 0 450 46.7599 D 3162.78 D Common Stock 2011-02-07 4 M 0 375 37.40 A 3537.78 D Common Stock 2011-02-07 4 S 0 375 46.7599 D 3162.78 D Common Stock 2011-02-07 4 M 0 625 32.09 A 3787.78 D Common Stock 2011-02-07 4 S 0 625 46.7599 D 3162.78 D Common Stock 2011-02-07 4 M 0 755 23.21 A 3917.78 D Common Stock 2011-02-07 4 S 0 755 46.7599 D 3162.78 D Common Stock 2011-02-07 4 M 0 1162 31.11 A 4324.78 D Common Stock 2011-02-07 4 S 0 1162 46.7599 D 3162.78 D Stock Options (Right to Buy) 31.57 2011-02-07 4 M 0 450 0 D 2007-12-01 2016-12-01 Common Stock 450 0 D Stock Options (Right to Buy) 37.40 2011-02-07 4 M 0 375 0 D 2008-11-30 2017-11-30 Common Stock 375 375 D Stock Options (Right to Buy) 32.09 2011-02-07 4 M 0 625 0 D 2009-01-21 2018-01-21 Common Stock 625 625 D Stock Options (Right to Buy) 23.21 2011-02-07 4 M 0 755 0 D 2009-12-01 2018-12-01 Common Stock 755 1510 D Stock Options (Right to Buy) 31.11 2011-02-07 4 M 0 1162 0 D 2010-12-01 2019-12-01 Common Stock 1162 3488 D With original vesting schedule of 25% quarterly per year beginning on the first anniversary of grant date 12/1/2006. With original vesting schedule of 25% quarterly per year beginning on the first anniversary of grant date 11/30/2007. With original vesting schedule of 25% quarterly per year beginning on the first anniversary of grant date 1/21/2008. With original vesting schedule of 25% quarterly per year beginning on the first anniversary of grant date 12/1/2008. With original vesting schedule of 25% quarterly per year beginning on the first anniversary of grant date 12/1/2009. /s/ H. Carol Bernstein (Power of Attorney) 2011-02-08