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Accrued Expenses And Other Current Liabilities (Tables)
6 Months Ended
Mar. 31, 2022
Payables and Accruals [Abstract]  
Accrued Expenses And Other Current Liabilities
March 31, 2022September 30, 2021
Accrued compensation$34,501 $47,360 
Income taxes payable15,585 16,836 
Dividends payable13,755 13,827 
Asset retirement obligation (current)12,163 11,933 
Entegris Transaction-related liabilities11,593 — 
Contract liabilities (current)10,254 8,883 
Taxes, other than income taxes7,577 6,620 
Current portion of operating lease liability7,328 7,646 
Current portion of terminated swap liability (See Note 12)
5,855 5,855 
Goods and services received, not yet invoiced4,859 3,866 
Accrued interest197 1,846 
Interest rate swap liability (See Note 12)
— 2,995 
Other9,071 12,130 
Total$132,738 $139,797