144 0001197452 XXXXXXXX LIVE 0001101302 Entegris, Inc. 001-32598 129 Concord Road Billerica MA 01821 1-978-436-6500 Bertrand Loy Director Common Goldman Sachs & Co. LLC 200 West Street New York NY 10282 50322 6911223.48 152000000 02/25/2026 NASD Common 02/19/2021 Acquired as compensation -- Restricted Stock Units Issuer N 16311 02/19/2021 Compensation Common 02/11/2022 Acquired as compensation -- Restricted Stock Units Issuer N 13023 02/11/2022 Compensation Common 02/19/2025 Acquired as compensation -- Restricted Stock Units Issuer N 20988 02/19/2025 Compensation N Bertrand Loy 129 Concord Road Billerica MA 01821 Common 12/01/2025 57570 4426021.9 Bertrand Loy 129 Concord Road Billerica MA 01821 Common 02/02/2026 65250 7804382.85 Bertrand Loy 129 Concord Road Billerica MA 01821 Common 02/24/2026 9838 1385003.67 Bertrand Loy 129 Concord Road Billerica MA 01821 Common 02/24/2026 49678 6885067.76 02/25/2026 Goldman Sachs & Co. LLC on behalf of Bertrand Loy