POWER OF
ATTORNEY
Know all by these presents that
the undersigned hereby
constitutes, designates and appoints Bertrand Loy, Gregory Graves
and Joseph Colellaas such person’s true and
lawful attorneys-in-fact and
agents, each with full power of substitution and resubstitution and full
power to act alone and without the other, for the undersigned and in the
undersigned’s name, place and stead, in any and all capacities,
to:
(1) execute
for and on behalf of the undersigned, in the undersigned’s
capacity as an officer and/or director of Entegris, Inc. (the
“Company”), any and all Forms 3, 4 and 5
(including any amendments thereto) required to be filed by the
undersigned in accordance with Section 16(a) of the Securities Exchange Act of
1934, as amended (the “Act”),
and the rules and regulations thereunder;
(2) do and
perform any and all acts for and on behalf of the undersigned which may
be necessary or desirable to complete and execute any such Form 3, 4 or 5,
complete and execute any amendment or amendments thereto, and timely file such
form with the U.S.
Securities and Exchange Commission (the “SEC”) and
any stock exchange or similar authority;
(3) prepare,
execute in the undersigned’s name and on the undersigned’s
behalf, and submit to the SEC an Application for EDGAR Access (Form ID),
including amendments thereto, and any other documents necessary or appropriate
to obtain codes and passwords
enabling the undersigned to make electronic filings with the SEC of
reports required by Section 16(a) of the Act, or any rule or regulation of the
SEC;
(4) take any
other action of any type whatsoever in connection with the foregoing
which, in the opinion of such attorney-in-fact, may be of benefit to, in the
best interest of, or legally required by, the undersigned, it being understood
that the documents
executed by such attorney-in-fact on behalf of the undersigned, pursuant
to this Power of Attorney, shall be in such form and shall contain such terms
and conditions as such attorney-in-fact may approve in such
attorney-in-fact’s discretion.
The undersigned hereby grants to each such
attorney-in-fact full power and authority to do and perform any and every act
and thing
whatsoever requisite, necessary, or proper to be done in the exercise of
any of the rights and powers herein granted, as fully to all intents and
purposes as the undersigned might or could do if personally present, with full
power of substitution or
revocation, hereby ratifying and confirming all that such
attorney-in-fact, or such attorney-in-fact’s substitute or substitutes,
shall lawfully do or cause to be done by virtue of this Power of Attorney and
the rights and powers herein granted. The
undersigned acknowledges that no such attorney-in-fact, in serving in such
capacity at the request of the undersigned, is hereby assuming, nor is the
Company hereby assuming, any of the undersigned’s responsibilities to
comply with Section 16 of the
Act.
This Power of Attorney shall remain in full
force and effect until the undersigned is no longer required to file Forms 3, 4
and 5
with respect to the undersigned’s holdings of and transactions in
securities issued by the Company, unless earlier revoked by the undersigned in a
signed writing delivered to the foregoing attorney-in-fact.
IN WITNESS WHEREOF, the undersigned has caused
this Power of Attorney to be executed as of this 8th day of July, 2022.
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By:
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/s/ Daniel D.
Woodland
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Print:
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Daniel D. Woodland
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