X0303 4 2009-01-14 0001101302 ENTEGRIS INC ENTG 0001197452 LOY BERTRAND 2 SETTLEMENT WAY ACTON MA 01720 0 1 0 0 Exec VP & COO Common Stock 2009-01-14 4 A 0 18844 0 A 269074 D These shares are restriced and were issued in connection with a salary reduction which will remain in place through December 31, 2009. The restrictions on the shares lapse on January 14, 2010. The number of restricted shares in this grant were calculated by dividing the amount of the salary reduction referenced in footnote 1 by the closing price of $1.99 on the date of grant Peter W. Walcott, Attorney-in-Fact for Bertrand Loy 2009-01-16