Quarterly Information (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2012	Sep. 29, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Oct. 01, 2011	Jul. 02, 2011	Apr. 02, 2011	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
Schedule Of Quarterly Financial Information [Line Items]
Net sales	$ 167,818	$ 184,449	$ 188,233	$ 175,403	$ 163,922	$ 173,014	$ 209,198	$ 203,125	$ 715,903	$ 749,259	$ 688,416
Gross profit	66,461	81,932	82,746	76,244	67,614	74,828	95,143	88,345	307,383	325,930	310,643
Net income attributable to Entegris, Inc.	$ 11,256	$ 18,037	$ 21,673	$ 17,859	$ 40,161	$ 21,988	$ 32,522	$ 29,175	$ 68,825	$ 123,846	$ 84,356
Basic income per share attributable to Entegris, Inc.	$ 0.08	$ 0.13	$ 0.16	$ 0.13	$ 0.30	$ 0.16	$ 0.24	$ 0.22	$ 0.50	$ 0.92	$ 0.64
Diluted income per share attributable to Entegris, Inc.	$ 0.08	$ 0.13	$ 0.16	$ 0.13	$ 0.29	$ 0.16	$ 0.24	$ 0.22	$ 0.50	$ 0.91	$ 0.63