Consolidated Statements Of Operations (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
Net sales	$ 715,903	$ 749,259	$ 688,416
Cost of sales	408,520	423,329	377,773
Gross profit	307,383	325,930	310,643
Selling, general and administrative expenses	147,405	140,847	147,051
Engineering, research and development expenses	50,940	47,980	43,934
Amortization of intangible assets	9,594	10,225	13,231
Operating income	99,444	126,878	106,427
Interest expense	271	886	3,598
Interest income	(281)	(227)	(82)
Other (income) expense, net	(249)	(1,745)	1,430
Income before income taxes	99,703	127,964	101,481
Income tax expense	30,881	4,217	15,006
Equity in net (income) loss of affiliates	(3)	(499)	1,353
Net income	68,825	124,246	85,122
Less net income attributable to the noncontrolling interest		400	766
Net income attributable to Entegris, Inc.	$ 68,825	$ 123,846	$ 84,356
Amounts attributable to Entegris, Inc.:
Basic net income per common share	$ 0.50	$ 0.92	$ 0.64
Diluted net income per common share	$ 0.50	$ 0.91	$ 0.63
Weighted shares outstanding
Basic	137,306	134,685	131,685
Diluted	138,412	136,223	133,174