Condensed Consolidated Statements Of Comprehensive Income (USD $) In Thousands, unless otherwise specified	3 Months Ended		9 Months Ended
	Sep. 29, 2012	Oct. 01, 2011	Sep. 29, 2012	Oct. 01, 2011
Net income	$ 18,037	$ 21,988	$ 57,569	$ 84,085
Other comprehensive income, net of tax
Foreign currency translation adjustments	7,869	(4,913)	3,729	2,026
Reclassification of cumulative translation adjustment associated with sale of equity method investee				(1,715)
Reclassification of cumulative translation adjustment associated with acquisition of business			(216)
Pension liability adjustments, net of income tax expense of $0 and $0 for three and nine months ended September 29, 2012 and $1,289 and $1,335 for three and nine months ended October 1, 2011	(7)	2,401	8	2,444
Other comprehensive income	7,862	(2,512)	3,521	2,755
Comprehensive income	25,899	19,476	61,090	86,840
Less comprehensive income attributable to the noncontrolling interest				620
Comprehensive income attributable to Entegris, Inc.	$ 25,899	$ 19,476	$ 61,090	$ 86,220