<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0306</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2014-09-30</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0001101302</issuerCik>
        <issuerName>ENTEGRIS INC</issuerName>
        <issuerTradingSymbol>ENTG</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001106191</rptOwnerCik>
            <rptOwnerName>GMT CAPITAL CORP</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>GMT CAPITAL CORP</rptOwnerStreet1>
            <rptOwnerStreet2>2300 WINDY RIDGE PARKWAY SUITE 550 SOUTH</rptOwnerStreet2>
            <rptOwnerCity>ATLANTA</rptOwnerCity>
            <rptOwnerState>GA</rptOwnerState>
            <rptOwnerZipCode>30339</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>COMMON STOCK</value>
                <footnoteId id="F1"/>
                <footnoteId id="F2"/>
                <footnoteId id="F3"/>
                <footnoteId id="F4"/>
            </securityTitle>
            <transactionDate>
                <value>2014-09-30</value>
            </transactionDate>
            <deemedExecutionDate>
                <value>2014-09-30</value>
            </deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>P</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionTimeliness>
                <value></value>
            </transactionTimeliness>
            <transactionAmounts>
                <transactionShares>
                    <value>92600</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>11.54</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>14019963</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">This Form 4 is being jointly filed by Bay Resource Partners, L.P., a Delaware limited partnership (Bay), Bay II Resource Partners, L.P., a Delaware limited partnership (Bay II), Bay Resource Partners Offshore Master Fund, L.P., an exempted limited partnership organized under the laws of the Cayman Islands (Offshore Fund), GMT Exploration Company LLC,  a Delaware limited liability company (GMT Exploration).The foregoing persons are hereinafter sometimes collectively referred to as the Reporting Persons.</footnote>
        <footnote id="F2">GMT Capital, the general partner of Bay and Bay II, has the power to direct the affairs of Bay and Bay II, including the voting and disposition of shares. As the discretionary investment manager of the Offshore Fund and certain other accounts, GMT Capital has power to direct the voting and disposition of shares held by the Offshore Fund and such accounts.</footnote>
        <footnote id="F3">The aggregate number of shares of common stock purchased was 92,600 shares and such shares were purchased by the Reporting Persons in the following amounts:  Bay = 22,100 shares; Bay II = 22,500 shares; Offshore Fund = 48,000 shares.</footnote>
        <footnote id="F4">14,019,963 shares of common stock is the aggregate number of shares of common stock owned by the Reporting Persons and is owned as follows:  Bay = 2,193,700 shares directly owned by it; Bay II = 4,128,800 shares directly owned by it; Offshore Fund = 7,697,463 shares directly owned by it.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Philip J. Meyers</signatureName>
        <signatureDate>2014-09-30</signatureDate>
    </ownerSignature>
</ownershipDocument>
