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Segment Reporting - Summary of Financial Information by Reportable Segment and Geography (Details) - USD ($)
$ in Thousands
 3 Months Ended 6 Months Ended 9 Months Ended
Jul. 01, 2023
Jul. 02, 2022
Jul. 01, 2023
Jul. 02, 2022
Oct. 01, 2022
Segment Reporting Information [Line Items]          
Net Sales $ 901,000 $ 692,489 $ 1,823,396 $ 1,342,135 $ 1,342,135
Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 200,073 179,412 398,077 345,188 345,188
Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 240,561 28,317 490,887 58,962 58,962
Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 283,614 274,133 552,911 540,770 540,770
Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 190,356 224,084 409,209 422,197 422,197
intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales (13,604) (13,457) (27,688) (24,982) (24,982)
North America          
Segment Reporting Information [Line Items]          
Net Sales 229,499 156,501 480,108 301,976 301,976
North America | Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 83,249 55,024 164,568 105,136 105,136
North America | Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 57,632 5,742 123,642 12,934 12,934
North America | Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 45,947 35,913 87,713 71,268 71,268
North America | Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 56,275 73,279 131,873 137,620 137,620
North America | intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales (13,604) (13,457) (27,688) (24,982) (24,982)
Taiwan          
Segment Reporting Information [Line Items]          
Net Sales 139,893 157,232 288,984 301,497 301,497
Taiwan | Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 23,947 28,314 47,982 55,577 55,577
Taiwan | Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 33,179 5,494 67,338 10,735 10,735
Taiwan | Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 53,987 84,132 108,222 162,175 162,175
Taiwan | Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 28,780 39,292 65,442 73,010 73,010
Taiwan | intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales 0 0     0
China          
Segment Reporting Information [Line Items]          
Net Sales 140,617 108,337 276,048 202,210 202,210
China | Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 17,697 28,450 34,044 50,993 50,993
China | Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 33,006 4,365 64,619 8,346 8,346
China | Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 54,701 43,720 110,372 84,241 84,241
China | Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 35,213 31,802 67,013 58,630 58,630
China | intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales 0 0     0
South Korea          
Segment Reporting Information [Line Items]          
Net Sales 112,893 84,251 233,549 172,406 172,406
South Korea | Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 21,037 18,456 41,682 36,861 36,861
South Korea | Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 34,848 6,333 70,574 12,382 12,382
South Korea | Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 29,824 29,443 59,653 63,135 60,028
South Korea | Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 27,184 30,019 61,640 60,028 12,382
South Korea | intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales 0 0     0
Japan          
Segment Reporting Information [Line Items]          
Net Sales 95,271 83,835 185,696 167,657 167,657
Japan | Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 16,987 20,582 37,264 43,097 43,097
Japan | Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 8,727 813 17,806 1,597 1,597
Japan | Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 57,789 46,939 107,542 94,598 28,365
Japan | Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 11,768 15,501 23,084 28,365 28,365
Japan | intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales 0 0     0
Europe          
Segment Reporting Information [Line Items]          
Net Sales 112,354 62,069 224,769 116,378 116,378
Europe | Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 23,738 13,376 46,894 24,607 24,607
Europe | Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 42,067 2,045 82,338 4,503 4,503
Europe | Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 24,647 21,319 51,651 39,693 39,693
Europe | Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 21,902 25,329 43,886 47,575 47,575
Europe | intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales 0 0     0
Southeast Asia          
Segment Reporting Information [Line Items]          
Net Sales 70,473 40,264 134,242 80,011 80,011
Southeast Asia | Specialty Chemicals and Electronic Materials SCEM          
Segment Reporting Information [Line Items]          
Net Sales 13,418 15,210 25,643 28,917 28,917
Southeast Asia | Advanced Planarization Solutions          
Segment Reporting Information [Line Items]          
Net Sales 31,102 3,525 64,570 8,465 8,465
Southeast Asia | Microcontamination Control MC          
Segment Reporting Information [Line Items]          
Net Sales 16,719 12,667 27,758 25,660 25,660
Southeast Asia | Advanced Materials Handling AMH          
Segment Reporting Information [Line Items]          
Net Sales 9,234 8,862 $ 16,271 $ 16,969 16,969
Southeast Asia | intersegment elimination          
Segment Reporting Information [Line Items]          
Net Sales $ 0 $ 0     $ 0