Segment Reporting - Summary of Financial Information for Reportable Segments (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended		9 Months Ended
	Jul. 01, 2023	Jul. 02, 2022	Jul. 01, 2023	Jul. 02, 2022	Oct. 01, 2022
Segment Reporting Information [Line Items]
Net Sales	$ 901,000	$ 692,489	$ 1,823,396	$ 1,342,135	$ 1,342,135
Total Segment Profit	352,229	192,751	466,869	386,910
Goodwill impairment included in APS segment	88,900
Gain (Loss) on Contract Termination	154,800		154,754	0
Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	200,073	179,412	398,077	345,188	345,188
Total Segment Profit	173,319	35,539	176,587	73,231
Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	240,561	28,317	490,887	58,962	58,962
Total Segment Profit	42,419	10,179	9,629	21,338
Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	283,614	274,133	552,911	540,770	540,770
Total Segment Profit	100,661	100,107	196,658	198,725
Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	190,356	224,084	409,209	422,197	422,197
Total Segment Profit	35,830	46,926	83,995	93,616
intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	$ (13,604)	$ (13,457)	$ (27,688)	$ (24,982)	$ (24,982)