Goodwill Rollforward (Details) $ in Thousands		6 Months Ended
	Jul. 01, 2023 USD ($)	Jul. 01, 2023 USD ($)
Goodwill [Line Items]
Goodwill - Beginning		$ 4,408,331
Goodwill, Impaired, Accumulated Impairment Loss	$ (88,900)	(88,900)
Goodwill, Written off Related to Sale of Business Unit		(90,005)
Purchase Accounting Adjustments	1,000	(1,021)
Long-Lived Asset, Held-for-Sale, Fair Value Disclosure	254,660	254,660
Foreign currency translation	3,500	(3,526)
Goodwill - End	3,970,247	3,970,247
Goodwill, Other Increase (Decrease)		438,100
Specialty Chemicals and Electronic Materials SCEM
Goodwill [Line Items]
Goodwill - Beginning		561,328
Goodwill, Impaired, Accumulated Impairment Loss	0	0
Goodwill, Written off Related to Sale of Business Unit		(90,005)
Purchase Accounting Adjustments		3,409
Long-Lived Asset, Held-for-Sale, Fair Value Disclosure	(3,885)	(3,885)
Foreign currency translation		(33)
Goodwill - End	470,814	470,814
Advanced Planarization Solutions
Goodwill [Line Items]
Goodwill - Beginning		3,530,813
Goodwill, Impaired, Accumulated Impairment Loss	(88,872)	(88,872)
Goodwill, Written off Related to Sale of Business Unit		0
Purchase Accounting Adjustments		(4,430)
Long-Lived Asset, Held-for-Sale, Fair Value Disclosure	(250,775)	(250,775)
Foreign currency translation		0
Goodwill - End	3,186,736	3,186,736
Microcontamination Control MC
Goodwill [Line Items]
Goodwill - Beginning		242,088
Goodwill, Impaired, Accumulated Impairment Loss	0	0
Goodwill, Written off Related to Sale of Business Unit		0
Purchase Accounting Adjustments		0
Long-Lived Asset, Held-for-Sale, Fair Value Disclosure	0	0
Foreign currency translation		(3,493)
Goodwill - End	238,595	238,595
Advanced Materials Handling AMH
Goodwill [Line Items]
Goodwill - Beginning		74,102
Goodwill, Impaired, Accumulated Impairment Loss	0	0
Goodwill, Written off Related to Sale of Business Unit		0
Purchase Accounting Adjustments		0
Long-Lived Asset, Held-for-Sale, Fair Value Disclosure	0	0
Foreign currency translation		0
Goodwill - End	$ 74,102	$ 74,102