Consolidated Statements Of Equity - USD ($) shares in Thousands, $ in Thousands	Total	Common stock	Treasury Stock, Common	Additional paid-in capital	Retained earnings (deficit)	Foreign currency translation adjustments	Defined benefit pension adjustments	Accumulated Gain (Loss), Net, Cash Flow Hedge, Parent [Member]
Balance	$ 1,165,889	$ 1,349	$ (7,112)	$ 842,784	$ 366,127	$ (36,468)	$ (791)	$ 0
Balance (in shares) at Dec. 31, 2019		134,930	202
Shares issued under stock plans (in shares)		997
Shares issued under stock plans	(16,062)	$ 10	$ 0	(16,072)	0	0	0	0
Share-based compensation expense	22,920	$ 0	0	22,920	0	0	0	0
Repurchase and retirement of common stock (in shares)		(778)
Repurchase and retirement of common stock	(44,563)	$ (8)	0	(4,820)	(39,735)	0	0	0
Dividends, Common Stock, Cash	(43,490)	0	0	38	(43,528)	0	0	0
Pension liability adjustment	(49)	0	0	0	0	0	(49)	0
Foreign currency translation	(120)	0	0	0	0	(120)	0	0
Net income	294,969	$ 0	$ 0	0	294,969	0	0	0
Balance (in shares) at Dec. 31, 2020		135,149	202
Balance	1,379,494	$ 1,351	$ (7,112)	844,850	577,833	(36,588)	(840)	0
Shares issued under stock plans (in shares)		1,133
Shares issued under stock plans	8,654	$ 11	0	8,643	0	0	0	0
Share-based compensation expense	29,884	$ 0	0	29,884	0	0	0	0
Repurchase and retirement of common stock (in shares)		(563)
Repurchase and retirement of common stock	(67,109)	$ (5)	0	(3,547)	(63,557)	0	0	0
Dividends, Common Stock, Cash	(43,611)	0	0	15	(43,626)	0	0	0
Pension liability adjustment	(382)	0	0	0	0	0	(382)	0
Foreign currency translation	(2,275)	0	0	0	0	(2,275)	0	0
Net income	409,126	$ 0	$ 0	0	409,126	0	0	0
Balance (in shares) at Dec. 31, 2021		135,719	202
Balance	1,713,781	$ 1,357	$ (7,112)	879,845	879,776	(38,863)	(1,222)	0
Shares issued under stock plans (in shares)		692
Shares issued under stock plans	(6,652)	$ 7	0	(6,659)	0	0	0	0
Share-based compensation expense	66,578	0	0	66,578	0	0	0	0
Repurchase and retirement of common stock	0
Issuance of common stock in connection with CMC Materials acquisition	1,265,690	$ 129	0	1,265,561	0	0	0	0
Issuance of common stock in connection with CMC Materials acquisition		12,928
Dividends, Common Stock, Cash	(57,305)	$ 0	0	0	(57,305)		0	0
Interest Rate Swap - Cash flow hedge	36,069	0	0	0	0	0	0	36,069
Pension liability adjustment	1,139	0	0	0	0	0	1,139	0
Foreign currency translation	(10,220)	0	0	0	0	(10,220)	0	0
Net income	208,920	$ 0	$ 0	0	208,920	0	0	0
Balance (in shares) at Dec. 31, 2022		149,339	202
Balance	$ 3,218,000	$ 1,493	$ (7,112)	$ 2,205,325	$ 1,031,391	$ (49,083)	$ (83)	$ 36,069