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Benefit Plans (Tables)
 12 Months Ended
Dec. 31, 2022
Defined Benefit Plans and Other Postretirement Benefit Plans Disclosures [Abstract]  
Schedule of Defined Benefit Plans Disclosures
Defined Benefit Plans
The employees of the Company’s subsidiaries in Japan, Taiwan, South Korea, France and Germany are covered in defined benefit pension plans. As part of the CMC Materials acquisition in 2022, the Company assumed $10.1 million of projected benefit obligation. The Company uses a December 31 measurement date for its pension plans. A summary of these combined plans are:
(In thousands)20222021
Projected benefit obligation$15,253 $7,050 
Fair value of plan assets1,014 969 
Plan assets less benefit obligation - net amount recognized(14,239)(6,081)
Accumulated benefit obligation12,151 5,995 
Expected Contribution And Benefit Payments The Company expects to make the following contributions and benefit payments:
(In thousands)Payments
2023$735 
2024779 
20251,264 
20261,127 
2027922 
Years 2028-2032
5,940