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Summary of Financial Information for Reportable Segments (Details) (USD $)
In Thousands, unless otherwise specified
 3 Months Ended
Mar. 28, 2015
Mar. 29, 2014
Segment Reporting Information [Line Items]    
Total net sales $ 263,373us-gaap_SalesRevenueNet $ 165,804us-gaap_SalesRevenueNet
Total Segment Profit 61,563entg_TotalSegmentProfit 34,230entg_TotalSegmentProfit
CMH    
Segment Reporting Information [Line Items]    
Total net sales 167,468us-gaap_SalesRevenueNet
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember		 145,569us-gaap_SalesRevenueNet
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
Total Segment Profit 41,341entg_TotalSegmentProfit
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember		 30,526entg_TotalSegmentProfit
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
EM    
Segment Reporting Information [Line Items]    
Total net sales 95,905us-gaap_SalesRevenueNet
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember		 20,235us-gaap_SalesRevenueNet
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
Total Segment Profit $ 20,222entg_TotalSegmentProfit
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember		 $ 3,704entg_TotalSegmentProfit
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember