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Goodwill Goodwill (Details) (USD $)
In Thousands, unless otherwise specified
3 Months Ended
Mar. 28, 2015
Mar. 29, 2014
Goodwill [Line Items]    
Goodwill, beginning $ 340,743us-gaap_Goodwill $ 12,274us-gaap_Goodwill
Addition due to acquisition 7,186us-gaap_GoodwillPurchaseAccountingAdjustments  
Other, including foreign currency translation (324)us-gaap_GoodwillTranslationAdjustments (33)us-gaap_GoodwillTranslationAdjustments
Goodwill, ending 347,605us-gaap_Goodwill 12,241us-gaap_Goodwill
Goodwill, Period Increase (Decrease) 6,862us-gaap_GoodwillPeriodIncreaseDecrease  
CMH    
Goodwill [Line Items]    
Goodwill, beginning 47,483us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
12,274us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
Addition due to acquisition 0us-gaap_GoodwillPurchaseAccountingAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
 
Other, including foreign currency translation 37us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
(33)us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
Goodwill, ending 47,520us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
12,241us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
EM    
Goodwill [Line Items]    
Goodwill, beginning 293,260us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
0us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
Addition due to acquisition 7,186us-gaap_GoodwillPurchaseAccountingAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
 
Other, including foreign currency translation (361)us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
0us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
Goodwill, ending $ 300,085us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
$ 0us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember