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Intangible Assets Goodwill (Details) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Goodwill [Line Items]      
Goodwill $ 340,743,000us-gaap_Goodwill $ 12,274,000us-gaap_Goodwill $ 2,209,000us-gaap_Goodwill
Goodwill, Acquired During Period 332,124,000us-gaap_GoodwillAcquiredDuringPeriod 10,090,000us-gaap_GoodwillAcquiredDuringPeriod  
Goodwill, Translation Adjustments (3,655,000)us-gaap_GoodwillTranslationAdjustments (25,000)us-gaap_GoodwillTranslationAdjustments  
Goodwill, Period Increase (Decrease) 328,500,000us-gaap_GoodwillPeriodIncreaseDecrease    
CMH      
Goodwill [Line Items]      
Goodwill 47,483,000us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
12,274,000us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
2,209,000us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
Goodwill, Acquired During Period 35,329,000us-gaap_GoodwillAcquiredDuringPeriod
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
10,090,000us-gaap_GoodwillAcquiredDuringPeriod
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
 
Goodwill, Translation Adjustments (120,000)us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
(25,000)us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_CriticalMaterialsHandlingCMHMember
 
EM      
Goodwill [Line Items]      
Goodwill 293,260,000us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
0us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
0us-gaap_Goodwill
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
Goodwill, Acquired During Period 296,795,000us-gaap_GoodwillAcquiredDuringPeriod
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
0us-gaap_GoodwillAcquiredDuringPeriod
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
 
Goodwill, Translation Adjustments $ (3,535,000)us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember
$ 0us-gaap_GoodwillTranslationAdjustments
/ us-gaap_StatementBusinessSegmentsAxis
= entg_ElectronicMaterialsEMMember