Quarterly Information (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2013	Sep. 28, 2013	Jun. 29, 2013	Mar. 30, 2013	Dec. 31, 2012	Sep. 29, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Schedule Of Quarterly Financial Information [Line Items]
Net sales	$ 186,260	$ 164,585	$ 177,544	$ 165,070	$ 167,818	$ 184,449	$ 188,233	$ 175,403	$ 693,459	$ 715,903	$ 749,259
Gross profit	79,384	70,132	77,570	67,128	66,461	81,932	82,746	76,244	294,214	307,383	325,930
Net income attributable to Entegris, Inc.	$ 20,541	$ 17,807	$ 19,781	$ 16,397	$ 11,256	$ 18,037	$ 21,673	$ 17,859	$ 74,526	$ 68,825	$ 123,846
Basic income per share attributable to Entegris, Inc.	$ 0.15	$ 0.13	$ 0.14	$ 0.12	$ 0.08	$ 0.13	$ 0.16	$ 0.13	$ 0.54	$ 0.50	$ 0.92
Diluted income per share attributable to Entegris, Inc.	$ 0.15	$ 0.13	$ 0.14	$ 0.12	$ 0.08	$ 0.13	$ 0.16	$ 0.13	$ 0.53	$ 0.50	$ 0.91