Subsequent Event Subsequent Event (Details) (USD $)	12 Months Ended				0 Months Ended	12 Months Ended				0 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011	Feb. 04, 2014	Feb. 04, 2014 ATMI [Member]	Dec. 31, 2013 ATMI [Member]	Feb. 04, 2014 Senior secured term loan facility [Member]	Feb. 04, 2014 Senior unsecured notes [Member]	Feb. 04, 2014 Senior secured asset-based revolving [Member]	Feb. 04, 2014 ATMI [Member]	Feb. 04, 2014 Entegris [Member]
Subsequent Event [Line Items]
Payments to Acquire Businesses, Net of Cash Acquired	$ 13,358,000	$ 2,961,000	$ 0		$ 1,200,000,000
Business Acquisition, Revenue Reported by Acquired Entity for Last Annual Period						361,000,000
Sale of Stock, Price Per Share				$ 34
Termination Fee										30,000,000	100,000,000
Maximum borrowing capacity of line of credit agreements							$ 460,000,000	$ 360,000,000	$ 85,000,000