Income Taxes - Additional Information (Detail) (USD $)	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Income Tax [Line Items]
Income tax expense benefit per diluted share	$ 0.04	$ 0.02
Income tax benefit estimate attributable to the tax status of subsidiary	$ 5,400,000	$ 2,400,000	$ 0
Net deferred tax assets	18,810,000	23,972,000
Deferred Tax Assets, Valuation Allowance	5,435,000	4,990,000
Undistributed foreign earnings	257,000,000
Withholding taxes to be incurred on distribution of retained earnings	6,300,000
Unrecognized tax benefits that would impact effective tax rate	1,900,000
Accrued interest and penalties related to unrecognized tax benefits	800,000	1,000,000
Interest and penalties recognized in the statement of operations	(100,000)	0	0
Gross unrecognized tax benefit decrease within next twelve months	1,400,000
Nihon Entegris KK
Income Tax [Line Items]
Estimated taxable income	18,200,000
State
Income Tax [Line Items]
State operating loss carryforwards	2,000,000
Operating loss carryforwards, expiration date	Dec. 31, 2014
Year Which Prior Year's Tax Returns Are No Longer Subject to Tax Examination	Dec. 31, 2009
Foreign
Income Tax [Line Items]
Net deferred tax assets	8,200,000	10,200,000
Deferred Tax Assets, Valuation Allowance	0	600,000
Estimated taxable income required to realize foreign deferred tax assets	26,900,000
Operating loss carryforwards, expiration date	Dec. 31, 2015
Foreign tax credit carryforwards	3,200,000
Tax credit carryforwards, expiration date	Dec. 31, 2019
Foreign operating loss carryforwards	1,200,000
Year Which Prior Year's Tax Returns Are No Longer Subject to Tax Examination	Dec. 31, 2007
U.S.
Income Tax [Line Items]
Net deferred tax assets	16,000,000	18,700,000
Deferred Tax Assets, Valuation Allowance	5,400,000	4,400,000
Estimated taxable income required to realize domestic deferred tax assets	$ 21,500,000
Year Which Prior Year's Tax Returns Are No Longer Subject to Tax Examination	Dec. 31, 2009