Consolidated Statements Of Operations (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Net sales	$ 693,459	$ 715,903	$ 749,259
Cost of sales	399,245	408,520	423,329
Gross profit	294,214	307,383	325,930
Selling, general and administrative expenses	137,123	147,405	140,847
Engineering, research and development expenses	55,320	50,940	47,980
Amortization of intangible assets	9,347	9,594	10,225
Contingent consideration fair value adustment	(1,813)	0	0
Operating income	94,237	99,444	126,878
Other income, net	(1,958)	(259)	(1,086)
Income before income taxes and equity in net income of affiliates	96,195	99,703	127,964
Income tax expense	21,669	30,881	4,217
Equity in net income of affiliates	0	(3)	(499)
Net income	74,526	68,825	124,246
Less net income attributable to the noncontrolling interest	0	0	400
Net income attributable to Entegris, Inc.	$ 74,526	$ 68,825	$ 123,846
Amounts attributable to Entegris, Inc.:
Basic net income per common share	$ 0.54	$ 0.50	$ 0.92
Diluted net income per common share	$ 0.53	$ 0.50	$ 0.91
Weighted shares outstanding
Basic	138,950	137,306	134,685
Diluted	139,618	138,412	136,223