EX-21.1 3 rtec-ex211_6.htm EX-21.1 rtec-ex211_6.htm

Exhibit 21.1

 

SUBSIDIARIES

 

 

Name

 

Jurisdiction

Rudolph Technologies Europe, B.V.

 

Netherlands

Rudolph Technologies Japan KK

 

Japan

Rudolph Technologies (Shanghai) Trading Co., Ltd.

 

China

Rudolph Technologies Germany GmbH

 

Germany

Azores Asia Limited

 

Hong Kong