<SEC-DOCUMENT>0001564590-18-023915-index.html : 20181004
<SEC-HEADER>0001564590-18-023915.hdr.sgml : 20181004
<ACCEPTANCE-DATETIME>20181003173122
ACCESSION NUMBER:		0001564590-18-023915
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		3
CONFORMED PERIOD OF REPORT:	20181003
ITEM INFORMATION:		Other Events
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20181004
DATE AS OF CHANGE:		20181003

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-36226
		FILM NUMBER:		181106128

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		978-253-6200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>rtec-8k_20181003.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: rtec-8k_20181003.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>2
<FILENAME>rtec-ex991_7.htm
<DESCRIPTION>EX-99.1
<TEXT>
Document 2 - file: rtec-ex991_7.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>gc0uz4vpzkbx000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: gc0uz4vpzkbx000001.jpg

</DOCUMENT>
</SEC-DOCUMENT>