X0306 4 2017-05-17 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001257731 BERRY DANIEL H C/O RUDOLPH TECHNOLOGIES, INC. 16 JONSPIN ROAD WILMINGTON MA 01887 1 0 0 0 Common Stock 2017-05-17 4 A 0 4200 0.0 A 27000 D Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock. 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. By: /s/ Robert A. Koch For: Daniel H. Berry 2017-05-18