Geographic reporting [Abstract] Geographic reporting [Abstract] Schedule of Segment Reporting Information, by Segment [Table] Schedule of Segment Reporting Information, by Segment [Table] Geographical [Axis] Geographical [Axis] Segment, Geographical [Domain] Segment, Geographical [Domain] UNITED STATES UNITED STATES Taiwan [Member] Taiwan [Member] Taiwan [Member] JAPAN JAPAN CHINA CHINA South Korea [Domain] South Korea [Domain] South Korea [Domain] Segment, Geographical, Groups of Countries, Group One [Member] Segment, Geographical, Groups of Countries, Group One [Member] Austria [Domain] Austria [Domain] Austria [Domain] GERMANY GERMANY Segment, Geographical, Groups of Countries, Group Two [Member] Segment, Geographical, Groups of Countries, Group Two [Member] Sales [Member] Sales [Member] Segment Reporting Information [Line Items] Segment Reporting Information [Line Items] Revenues Revenues Organization and Nature of Operations: [Abstract] Organization and Nature of Operations: [Abstract] Commitments and Contingencies [Abstract] Commitments and Contingencies [Abstract] Commitments and Contingencies Disclosure [Text Block] Commitments and Contingencies Disclosure [Text Block] Fair Value Measurements [Abstract] Fair Value Measurements [Abstract] Fair Value, Measurement Inputs, Disclosure [Table Text Block] Fair Value, Measurement Inputs, Disclosure [Text Block] Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block] Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block] Fair value convertible senior notes [Table Text Block] Fair value convertible senior notes [Table Text Block] Fair value convertible senior notes [Table Text Block] Earnings Per Share [Abstract] Schedule of Earnings Per Share, Basic and Diluted [Table Text Block] Schedule of Earnings Per Share, Basic and Diluted [Table Text Block] Consolidated Statement of Comprehensive Income [Abstract] Consolidated Statement of Comprehensive Income [Abstract] Statement [Table] Statement [Table] Scenario [Axis] Scenario [Axis] Scenario, Unspecified [Domain] Scenario, Unspecified [Domain] Class of Stock [Axis] Class of Stock [Axis] Class of Stock [Domain] Class of Stock [Domain] Statement [Line Items] Statement [Line Items] Net Income (Loss) Attributable to Parent Net Income (Loss) Attributable to Parent Other Comprehensive Income (Loss), Net of Tax [Abstract] Other Comprehensive Income (Loss), Net of Tax [Abstract] Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax Comprehensive Income (Loss), Net of Tax, Attributable to Parent Comprehensive Income (Loss), Net of Tax, Attributable to Parent Share-based Compensation [Abstract] Summary of restricted stock unit activity [Table Text Block] Disclosure of Share-based Compensation Arrangements by Share-based Payment Award [Table Text Block] Consolidated Statements of Operations [Abstract] Consolidated Statements of Operations [Abstract] Cost of Revenue Cost of Revenue Gross Profit Gross Profit Operating Expenses [Abstract] Operating Expenses [Abstract] Research and Development Expense Research and Development Expense Selling, General and Administrative Expense Selling, General and Administrative Expense Amortization of Intangible Assets Amortization of Intangible Assets Operating Expenses Operating Expenses Operating Income (Loss) Operating Income (Loss) Interest Expense, net Interest Expense Other Nonoperating Income (Expense) Other Nonoperating Income (Expense) Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest Income Tax Expense (Benefit) Income Tax Expense (Benefit) Earnings Per Share, Basic Earnings Per Share, Basic Earnings Per Share, Diluted Earnings Per Share, Diluted Weighted Average Number of Shares Outstanding, Basic Weighted Average Number of Shares Outstanding, Basic Weighted Average Number of Shares Outstanding, Diluted Weighted Average Number of Shares Outstanding, Diluted Accumulated Other Comprehensive Loss [Abstract] Accumulated Other Comprehensive Loss [Abstract] Comprehensive Income (Loss) Note [Text Block] Comprehensive Income (Loss) Note [Text Block] Derivative Instruments and Hedging Activities [Abstract] Derivative Instruments and Hedging Activities [Abstract] Derivative [Table] Derivative [Table] Derivative, by Nature [Axis] Derivative, by Nature [Axis] Derivative, Name [Domain] Derivative, Name [Domain] Derivative [Line Items] Derivative [Line Items] Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments Derivative, Notional Amount Derivative, Notional Amount Derivative Asset, Fair Value, Gross Asset Derivative Asset, Fair Value, Gross Asset Identifiable Intangible Assets and Goodwill [Abstract] Identifiable Intangible Assets and Goodwill [Abstract] Schedule of Goodwill [Table Text Block] Schedule of Goodwill [Table Text Block] Schedule of Finite-Lived Intangible Assets by Major Class [Table Text Block] Schedule of Finite-Lived Intangible Assets [Table Text Block] Income Taxes [Abstract] Income Taxes [Abstract] Income Tax Disclosure [Text Block] Income Tax Disclosure [Text Block] Business Combination [Abstract] Business Combination [Abstract] Business Combination Disclosure [Text Block] Business Combination Disclosure [Text Block] Balance Sheet Detail [Abstract] Balance Sheet Detail [Abstract] Balance Sheet Details [Text Block] Balance Sheet Details [Text Block] Balance Sheet Details [Text Block] Other Non-current Liabilities [Abstract] Other Non-current Liabilities [Abstract] Unrecognized Tax Benefits Unrecognized Tax Benefits Other Liabilities Other Liabilities Other Liabilities, Noncurrent Other Liabilities, Noncurrent Income Tax Expense (Benefit) Effective Income Tax Rate Effective Income Tax Rate, Continuing Operations Valuation Allowance, Amount Valuation Allowance, Amount Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block] Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block] Schedule of changes product warranty liability [Table Text Block] Schedule of Product Warranty Liability [Table Text Block] Property Plant & Equipment [Abstract] Property Plant & Equipment [Abstract] Buildings and Land Gross Buildings and Land Gross Buildings and Land Gross Machinery and Equipment, Gross Machinery and Equipment, Gross Furniture and Fixtures, Gross Furniture and Fixtures, Gross Computer Equipments And Software Gross Computer Equipments And Software Gross Computer Equipments And Software Gross Leasehold Improvements, Gross Leasehold Improvements, Gross Property, Plant and Equipment, Gross Property, Plant and Equipment, Gross Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment Property, Plant and Equipment, Net Property, Plant and Equipment, Net Consolidated Statements of Cash Flows [Abstract] Consolidated Statements of Cash Flows [Abstract] Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract] Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract] Amortization Amortization Amortization of Financing Costs and Discounts Amortization of Financing Costs and Discounts Depreciation Depreciation Foreign Currency Transaction Gain (Loss), before Tax Foreign Currency Transaction Gain (Loss), before Tax Share-based Compensation Share-based Compensation Provision for doubtful accounts and inventory valuation Provision for doubtful accounts and inventory valuation Amount of the current period expense charged against operations, the offset which is generally to the allowance for doubtful accounts for the purpose of reducing receivables, including notes receivable, to an amount that approximates their net realizable value (the amount expected to be collected). Also includes the amount of the valuation account as of the balance sheet date which reduces the carrying amount of inventory to net realizable value; takes into consideration such factors as market value, excessive quantities based on expected sales, technological obsolescence, and shrinkage. Change in operating assets and liabilities [Abstract] Change in operating assets and liabilities [Abstract] Change in operating assets and liabilities [Abstract] Decrease (Increase) in Accounts Receivable Increase (Decrease) in Accounts Receivable Decrease (Increase) in Inventories Increase (Decrease) in Inventories Decrease (Increase) in Prepaid Expense and Other Assets Increase (Decrease) in Prepaid Expense and Other Assets Increase (Decrease) in Accounts Payable and Accrued Liabilities Increase (Decrease) in Accounts Payable and Accrued Liabilities Increase (Decrease) in Other Current Liabilities Increase (Decrease) in Other Current Liabilities Increase (Decrease) in Other Noncurrent Liabilities Increase (Decrease) in Other Noncurrent Liabilities Net Cash Provided by (Used in) Operating Activities Net Cash Provided by (Used in) Operating Activities Net Cash Provided by (Used in) Investing Activities [Abstract] Net Cash Provided by (Used in) Investing Activities [Abstract] Payments to Acquire Marketable Securities Payments to Acquire Marketable Securities Proceeds from Sale and Maturity of Marketable Securities Proceeds from Sale and Maturity of Marketable Securities Payments to Acquire Property, Plant, and Equipment Payments to Acquire Property, Plant, and Equipment Net Cash Provided by (Used in) Investing Activities Net Cash Provided by (Used in) Investing Activities Net Cash Provided by (Used in) Financing Activities [Abstract] Net Cash Provided by (Used in) Financing Activities [Abstract] Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities Net Cash Provided by (Used in) Financing Activities Net Cash Provided by (Used in) Financing Activities Effect of Exchange Rate on Cash and Cash Equivalents Effect of Exchange Rate on Cash and Cash Equivalents Cash and Cash Equivalents, Period Increase (Decrease) Cash and Cash Equivalents, Period Increase (Decrease) Cash and Cash Equivalents, at Carrying Value Cash and Cash Equivalents, at Carrying Value Supplemental Cash Flow Information [Abstract] Supplemental Cash Flow Information [Abstract] Income Taxes Paid Income Taxes Paid Interest Paid Interest Paid Standard Product Warranty Accrual Standard Product Warranty Accrual Product Warranty Accrual, Warranties Issued Product Warranty Accrual, Warranties Issued Product Warranty Accrual, Payments Product Warranty Accrual, Payments Share Repurchase Program [Abstract] Share Repurchase Program [Abstract] Share repurchase program, authorized amount of shares Stock Repurchase Program, Number of Shares Authorized to be Repurchased Restricted Stock Units Activity [Abstract] Restricted Stock Units Activity [Abstract] Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block] Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block] Debt Obligations [Abstract] Debt Obligations [Abstract] Schedule of carrying value of convertible senior notes [Table Text Block] Schedule of Long-term Debt Instruments [Table Text Block] Schedule of interest cost recognized on convertible senior notes [Table Text Block] Interest cost recognized on the convertible senior notes [Table Text Block] Interest cost recognized on the convertible senior notes [Table Text Block] Consolidated Balance Sheet [Abstract] Consolidated Balance Sheet [Abstract] Marketable Securities, Current Marketable Securities, Current Accounts Receivable, Net, Current Accounts Receivable, Net, Current Inventory, Net Inventory, Net Prepaid Expense and Other Assets Prepaid Expense and Other Assets Assets, Current Assets, Current Goodwill Goodwill Intangible Assets, Net (Excluding Goodwill) Intangible Assets, Net (Excluding Goodwill) Other Assets, Noncurrent Other Assets, Noncurrent Assets Assets Liabilities and Equity [Abstract] Liabilities and Equity [Abstract] Liabilities, Current [Abstract] Liabilities, Current [Abstract] Accounts Payable and Accrued Liabilities Accounts Payable and Accrued Liabilities Other Liabilities, Current Other Liabilities, Current Liabilities, Current Liabilities, Current Convertible senior notes Convertible Debt, Noncurrent Liabilities Liabilities Commitments and Contingencies Commitments and Contingencies Stockholders' Equity Attributable to Parent [Abstract] Stockholders' Equity Attributable to Parent [Abstract] Common Stock, Value, Issued Common Stock, Value, Issued Additional Paid in Capital, Common Stock Additional Paid in Capital, Common Stock Accumulated Other Comprehensive Income (Loss), Net of Tax Accumulated Other Comprehensive Income (Loss), Net of Tax Retained Earnings (Accumulated Deficit) Retained Earnings (Accumulated Deficit) Stockholders' Equity Attributable to Parent Stockholders' Equity Attributable to Parent Liabilities and Equity Liabilities and Equity Inventory Details [Abstract] Inventory Details [Abstract] Inventory, Raw Materials, Net of Reserves Inventory, Raw Materials, Net of Reserves Inventory, Work in Process, Net of Reserves Inventory, Work in Process, Net of Reserves Inventory, Finished Goods, Net of Reserves Inventory, Finished Goods, Net of Reserves Inventory, Net Inventory Valuation Reserves Inventory Valuation Reserves Segment Reporting and Geographic Information [Abstract] Segment Reporting and Geographic Information [Abstract] Business Segments [Axis] Business Segments [Axis] Segment [Domain] Segment [Domain] Inspection Revenue [Member] Inspection Revenue [Member] Inspection Revenue [Member] Percentage of Inspection Revenues [Member] Percentage of Inspection Revenues [Member] Percentage of Inspection Revenues [Member] Metrology Revenue [Member] Metrology Revenue [Member] Metrology Revenue [Member] Percentage of Metrology Revenue [Member] Percentage of Metrology Revenue [Member] Percentage of Metrology Revenue [Member] Lithography Revenue [Domain] Lithography Revenue [Domain] Litography Systems [Domain] Percentage of Lithography Revenue [Member] [Domain] Percentage of Lithography Revenue [Member] [Domain] Percentage of Lithography Revenue [Domain] Data Analysis & Review [Member] Data Analysis & Review [Member] Data Analysis & Review [Member] Percentage of Data Analysis & Review [Member] Percentage of Data Analysis & Review [Member] Percentage of Data Analysis & Review [Member] Sales Revenue, Goods, Net [Member] Sales Revenue, Goods, Net [Member] Percentage of Parts [Member] Percentage of Parts [Member] Percentage of revenue during the period from sale of goods in the normal course of business, after deducting returns, allowances and discounts, when it serves as a benchmark in a concentration of risk calculation. [Member] Sales Revenue, Services, Net [Member] Sales Revenue, Services, Net [Member] Percentage of Service [Member] Percentage of Service [Member] Percentage of revenue during the period from services rendered in the normal course of business, after deducting returns, allowances and discounts, when it serves as a benchmark in a concentration of risk calculation. [Member] Percentage of Total Revenue [Member] Percentage of Total Revenue [Member] Percentage of total revenue during the period in the normal course of business, after deducting returns, allowances and discounts, when it serves as a benchmark in a concentration of risk calculation. [Member] Debt Disclosure [Text Block] Debt Disclosure [Text Block] Loss Contingencies [Table] Loss Contingencies [Table] Range [Axis] Range [Axis] Range [Domain] Range [Domain] Minimum [Member] Minimum [Member] Maximum [Member] Maximum [Member] Loss Contingencies [Line Items] Loss Contingencies [Line Items] Loss Contingency, Damages Awarded, Value Loss Contingency, Damages Awarded, Value Loss Contingency, Range of Possible Loss, Minimum Loss Contingency, Range of Possible Loss, Minimum Loss Contingency, Range of Possible Loss, Maximum Loss Contingency, Range of Possible Loss, Maximum Estimated Litigation Liability Estimated Litigation Liability Subsequent Events [Abstract] Subsequent Events [Text Block] Subsequent Events [Text Block] Schedule of effective tax rate [Table Text Block] Schedule of effective tax rate [Table Text Block] Schedule of effective tax rate [Table Text Block] Statement of Other Comprehensive Income [Abstract] Equity Components [Axis] Equity Components [Axis] Accumulated Translation Adjustment [Member] Accumulated Translation Adjustment [Member] Accumulated Net Unrealized Investment Gain (Loss) [Member] Accumulated Net Unrealized Investment Gain (Loss) [Member] Accumulated Other Comprehensive Income (Loss) [Member] Accumulated Other Comprehensive Income (Loss) [Member] Net current period other comprehensive gain (loss) Net current period other comprehensive gain (loss) Net current period other comprehensive gain (loss) Reclassification of accumulated other comprehensive income (loss) Reclassification of accumulated other comprehensive income (loss) Reclassification of accumulated other comprehensive income (loss) Schedule of Inventory, Current [Table Text Block] Schedule of Inventory, Current [Table Text Block] Property, Plant and Equipment [Table Text Block] Property, Plant and Equipment [Table Text Block] Schedule of Other Assets [Table Text Block] Schedule of Other Assets [Table Text Block] Other Current liabilities [Table Text Block] Other Current liabilities [Table Text Block] Other Current liabilities [Table Text Block] Other Non-current liabilities [Table Text Block] Other Non-current liabilities [Table Text Block] Other Non-current liabilities [Table Text Block] Customer Reporting [Abstract] Customer Reporting [Abstract] Major Customers [Axis] Major Customers [Axis] Name of Major Customer [Domain] Name of Major Customer [Domain] Major Customers Two [Domain] Major Customers Two [Domain] Name or description of a single external customer that accounts for 10 percent or more of the entity's revenues. [Domain] Major Customer Three [Domain] Major Customer Three [Domain] Name or description of a single external customer that accounts for 10 percent or more of the entity's revenues. [Domain] Entity-Wide Revenue, Major Customer, Percentage Entity-Wide Revenue, Major Customer, Percentage Segment Reporting Disclosure [Text Block] Segment Reporting Disclosure [Text Block] Other Income (Expense) [Abstract] Other Income (Expense) [Abstract] Schedule of Other Nonoperating Income (Expense) [Table Text Block] Schedule of Other Nonoperating Income (Expense) [Table Text Block] Subsequent Event [Table] Subsequent Event [Table] Subsequent Event Type [Axis] Subsequent Event Type [Axis] Subsequent Event Type [Domain] Subsequent Event Type [Domain] Financing [Axis] Financing [Axis] Financing [Domain] Financing [Domain] Dividends [Axis] Dividends [Axis] Dividends [Domain] Dividends [Domain] Business Acquisition [Axis] Business Acquisition [Axis] Business Acquisition, Acquiree [Domain] Business Acquisition, Acquiree [Domain] Sale [Axis] Sale [Axis] Sale [Domain] Sale [Domain] Extraordinary Item [Axis] Extraordinary Item [Axis] Extraordinary Item [Domain] Extraordinary Item [Domain] Bankruptcy of Party [Axis] Bankruptcy of Party [Axis] Bankruptcy [Domain] Bankruptcy [Domain] Loss on Receivables [Axis] Loss on Receivables [Axis] Loss on Receivables [Domain] Loss on Receivables [Domain] Product Recall [Axis] Product Recall [Axis] Product Recall [Domain] Product Recall [Domain] Litigation Status [Axis] Litigation Status [Axis] Litigation Status [Domain] Litigation Status [Domain] Litigation Case [Axis] Litigation Case [Axis] Litigation Case Type [Domain] Litigation Case Type [Domain] New Contract [Axis] New Contract [Axis] New Contract [Domain] New Contract [Domain] Cancellation of Contract [Axis] Cancellation of Contract [Axis] Cancellation of Contract [Domain] Cancellation of Contract [Domain] Impairment in Value of Asset [Axis] Impairment in Value of Asset [Axis] Impairment in Value of Asset [Domain] Impairment in Value of Asset [Domain] Expropriation of Assets [Axis] Expropriation of Assets [Axis] Expropriation of Assets [Domain] Expropriation of Assets [Domain] Disposal Group Name [Axis] Disposal Group Name [Axis] Disposal Groups, Including Discontinued Operations, Name [Domain] Disposal Groups, Including Discontinued Operations, Name [Domain] Change in Tax Status [Axis] Change in Tax Status [Axis] Change in Tax Status [Domain] Change in Tax Status [Domain] Subsequent Event [Line Items] Subsequent Event [Line Items] Business Acquisition, Cost of Acquired Entity, Purchase Price Business Acquisition, Contingent Consideration, Potential Cash Payment Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount Net Income (Loss) Attributable to Parent Weighted Average Number of Shares Outstanding, Basic Weighted Average Number Diluted Shares Outstanding Adjustment Weighted Average Number Diluted Shares Outstanding Adjustment Weighted Average Number of Shares Outstanding, Diluted Earnings Per Share, Basic Earnings Per Share, Diluted Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Table] Fair Value Measurements, Recurring and Nonrecurring [Table] Fair Value by Measurement Frequency [Axis] Measurement Frequency [Axis] Fair Value, Measurement Frequency [Domain] Fair Value, Measurement Frequency [Domain] Fair Value, Hierarchy [Axis] Fair Value, Hierarchy [Axis] Fair Value, Measurements, Fair Value Hierarchy [Domain] Fair Value, Measurements, Fair Value Hierarchy [Domain] Fair Value, Inputs, Level 1 [Member] Fair Value, Inputs, Level 1 [Member] Fair Value, Inputs, Level 2 [Member] Fair Value, Inputs, Level 2 [Member] Fair Value, Inputs, Level 3 [Member] Fair Value, Inputs, Level 3 [Member] Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value Corporate Bonds Corporate Bonds Corporate Bonds Available-for-sale Securities, Failed Auction, Value Available-for-sale Securities, Failed Auction, Value Available-for-sale Securities, Fair Value Disclosure Available-for-sale Securities, Fair Value Disclosure Foreign Currency Contracts, Liability, Fair Value Disclosure Foreign Currency Contracts, Liability, Fair Value Disclosure Derivative Financial Instruments, Liabilities, Fair Value Disclosure Derivative Financial Instruments, Liabilities, Fair Value Disclosure Financial Instruments, Owned, at Fair Value Financial Instruments, Owned, at Fair Value Fair Value Input Discount Rate Fair Value Inputs, Discount Rate Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset Value Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset Value Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Gain (Loss) Included in Other Comprehensive Income (Loss) Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Gain (Loss) Included in Other Comprehensive Income (Loss) Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Purchases, Sales, Issues, Settlements Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Purchases, Sales, Issues, Settlements Fair Value, Level 3 Transfers out, Description Fair Value, Level 3 Transfers out, Description Convertible Debt Convertible Debt Long-term Debt, Fair Value Convertible Debt, Fair Value Disclosures Fair Value Inputs Discount Rate 2 Fair Value Inputs Discount Rate 2 Interest rate used to find the present value of an amount to be paid or received in the future as an input to measure fair value. For example, but not limited to, weighted average cost of capital (WACC), cost of capital, cost of equity and cost of debt. Long-term Debt, Contingent Payment of Principal or Interest Long-term Debt, Contingent Payment of Principal or Interest Other Income and Other Expense Disclosure [Text Block] Other Income and Other Expense Disclosure [Text Block] Marketable Securities [Abstract] Marketable Securities [Text Block] Investments in Debt and Marketable Equity Securities (and Certain Trading Assets) Disclosure [Text Block] Other Assets [Abstract] Deferred Tax Assets, Net of Valuation Allowance, Noncurrent Deferred Tax Assets, Net of Valuation Allowance, Noncurrent Capitalized Software Development Costs for Software Sold to Customers Capitalized Software Development Costs for Software Sold to Customers Other Other Assets Total Other Assets Share Repurchase [Text Block] Share Repurchase [Text Block] Share Repurchase [Text Block] Consolidated Balance Sheet (Parenthetical) [Abstract] Consolidated Balance Sheet (Parenthetical) [Abstract] Allowance for Doubtful Accounts Receivable, Current Allowance for Doubtful Accounts Receivable, Current Foreign currency exchange losses (gains), net Other Expenses Other Expenses Total other expenses (income) Marketable securities [Table] Schedule of Available-for-sale Securities [Table] Schedule of Available-for-sale Securities, Major Types of Debt and Equity Securities [Axis] Major Types of Debt and Equity Securities [Axis] Major Types of Debt and Equity Securities [Domain] Major Types of Debt and Equity Securities [Domain] Schedule of Available-for-sale Securities [Line Items] Schedule of Available-for-sale Securities [Line Items] Schedule of marketable securities by category [Table Text Block] Available-for-sale Securities [Table Text Block] Schedule of marketable securities classified by contractual maturity date [Table Text Block] Investments Classified by Contractual Maturity Date [Table Text Block] Schedule of marketable securities in unrealized loss positions [Table Text Block] Schedule of Unrealized Loss on Investments [Table Text Block] Schedule of revenue from external customers by Products and Services [Table Text Block] Revenue from External Customers by Products and Services [Table Text Block] Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block] Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block] Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block] Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block] Earnings (Loss) Per Share [Abstract] Earnings (Loss) Per Share [Abstract] Earnings Per Share [Text Block] Earnings Per Share [Text Block] Investment Type [Axis] Investment Type [Axis] Investment Type Categorization [Domain] Investment Type Categorization [Domain] US Government and Government Agencies and Authorities [Member] US Government and Government Agencies and Authorities [Member] Corporate Bond Securities [Member] Corporate Bond Securities [Member] Auction Rate Securities [Member] Auction Rate Securities [Member] Available-for-sale Securities [Member] Available-for-sale Securities [Member] Unrealized Gain (Loss) on Investments Unrealized Gain (Loss) on Investments Available-for-sale Securities, Amortized Cost Basis Available-for-sale Securities, Amortized Cost Basis Available-for-sale Securities, Gross Unrealized Gains Available-for-sale Securities, Gross Unrealized Gains Available-for-sale Securities, Gross Unrealized Losses Available-for-sale Securities, Gross Unrealized Losses Available-for-sale Securities, Debt Maturities, Fair Value [Abstract] Available-for-sale Securities, Debt Maturities, Fair Value, Fiscal Year Maturity [Abstract] Available-for-sale Securities, Debt Maturities, within One Year, Amortized Cost Basis Available-for-sale Securities, Debt Maturities, Next Twelve Months, Amortized Cost Basis Available-for-sale Securities, Debt Maturities, within One Year, Fair Value Available-for-sale Securities, Debt Maturities, Next Twelve Months, Fair Value Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Amortized Cost Basis Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Amortized Cost Basis Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Fair Value Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Fair Value Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis Held-to-maturity Securities, Debt Maturities, after Ten Years, Fair Value Held-to-maturity Securities, Debt Maturities, after Ten Years, Fair Value Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses Schedule of Finite-Lived Intangible Assets by Major Class [Table] Schedule of Finite-Lived Intangible Assets [Table] Finite-Lived Intangible Assets by Major Class [Axis] Finite-Lived Intangible Assets by Major Class [Axis] Finite-Lived Intangible Assets, Major Class Name [Domain] Finite-Lived Intangible Assets, Major Class Name [Domain] Developed Technology Rights [Member] Developed Technology Rights [Member] Customer Relationships [Member] Customer Relationships [Member] Trade Names [Member] Trade Names [Member] Finite-Lived Intangible Assets and Goodwill [Line Items] Finite-Lived Intangible Assets [Line Items] Finite-Lived Intangible Assets, Gross Finite-Lived Intangible Assets, Gross Finite-Lived Intangible Assets, Accumulated Amortization Finite-Lived Intangible Assets, Accumulated Amortization Amortization of Intangible Assets Future Amortization Expense, Remainder of Fiscal Year Finite-Lived Intangible Assets, Amortization Expense, Remainder of Fiscal Year Future Amortization Expense, Year One Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months Future Amortization Expense, Year Two Finite-Lived Intangible Assets, Amortization Expense, Year Two Future Amortization Expense, Year Three Finite-Lived Intangible Assets, Amortization Expense, Year Three Future Amortization Expense, Year Four Finite-Lived Intangible Assets, Amortization Expense, Year Four Future Amortization Expense, Year Five Finite-Lived Intangible Assets, Amortization Expense, Year Five Business Acquisition, Purchase Price Allocation, Goodwill Amount Business Acquisition, Purchase Price Allocation, Goodwill Amount Business Acquisition Purchase Price Allocation Goodwill Amount 2 Business Acquisition Purchase Price Allocation Goodwill Amount 2 Amount of goodwill arising from a business combination, which is the excess of the cost of the acquired entity over the amounts assigned to assets acquired and liabilities assumed. Derivative Instruments and Hedging Activities Disclosure [Text Block] Derivative Instruments and Hedging Activities Disclosure [Text Block] Letter of Credit [Abstract] Letter of Credit [Abstract] Loss Contingency Nature [Axis] Loss Contingency Nature [Axis] Loss Contingency, Nature [Domain] Loss Contingency, Nature [Domain] MaximumCapacityToGuaranteeUnderExistingLettersOfCredit MaximumCapacityToGuaranteeUnderExistingLettersOfCredit Maximum capacity to guarantee under all existing letters of credit without consideration of any amounts that could be guaranteed or the amounts currently outstanding under the letters of credit. Other Current Liabilities [Abstract] Other Current Liabilities [Abstract] Estimated Litigation Liability, Current Estimated Litigation Liability, Current Accrued Income Taxes, Current Accrued Income Taxes, Current Deferred Revenue Deferred Revenue Other Current Liabilities Subtotal Other Current Liabilities Subtotal The aggregate carrying amount, as of the balance sheet date, of current liabilities not separately disclosed in the balance sheet detail disclosure. Total other current liabilities Disclosure of Compensation Related Costs, Share-based Payments [Text Block] Disclosure of Compensation Related Costs, Share-based Payments [Text Block] Debt Instrument, Interest Rate, Stated Percentage Debt Instrument, Interest Rate, Stated Percentage Convertible Preferred Stock, Shares Issued upon Conversion Convertible Preferred Stock, Shares Issued upon Conversion Note increment for which conversion amount of Common Stock based Principal Amount of Note Principal Amount of Note Debt Instrument, Convertible, Conversion Price Debt Instrument, Convertible, Conversion Price Class of Warrant or Right, Exercise Price of Warrants or Rights Warrant Strike Price strike price of the warrant will initially be per share Proceeds from Convertible Debt Proceeds from Convertible Debt Convertible Debt Debt Instrument, Face Amount Debt Instrument, Unamortized Discount Debt Instrument, Unamortized Discount Contractual Interest Coupon Contractual Interest Coupon Contractual Interest Coupon Amortization of Debt Discount (Premium) Amortization of Debt Discount (Premium) Amortization of Financing Costs Amortization of Financing Costs Interest Expense, Debt Interest Expense, Debt Document and Entity Information [Abstract] Document and Entity Information [Abstract] Entities [Table] Entities [Table] Legal Entity [Axis] Legal Entity [Axis] Entity [Domain] Entity [Domain] Entity Information [Line Items] Entity Information [Line Items] Entity Registrant Name Entity Registrant Name Entity Central Index Key Entity Central Index Key Current Fiscal Year End Date Current Fiscal Year End Date Entity Filer Category Entity Filer Category Document Type Document Type Document Period End Date Document Period End Date Document Fiscal Year Focus Document Fiscal Year Focus Document Fiscal Period Focus Document Fiscal Period Focus Amendment Flag Amendment Flag Entity Common Stock, Shares Outstanding Entity Common Stock, Shares Outstanding Intangible Assets Disclosure [Text Block] Goodwill and Intangible Assets Disclosure [Text Block] Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block] Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block] Fair Value Disclosures [Text Block] Fair Value Disclosures [Text Block]