Commitments and Contingencies - (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
Mar. 31, 2013	Mar. 31, 2012	Dec. 31, 2012	Dec. 31, 2011
Commitments and Contingencies [Abstract]
Standard Product Warranty Accrual	$ 1,765	$ 1,390	$ 2,024	$ 1,406
Product Warranty Accrual, Warranties Issued	446	506
Product Warranty Accrual, Payments	$ (705)	$ (522)

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Namespace Prefix:	rtec_
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Represents the aggregate decrease in the liability related to payments to satisfy claims for standard and extended product warranties.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 460

-SubTopic 10

-Section 50

-Paragraph 8

-Subparagraph ((c)(2))

-URI http://asc.fasb.org/extlink&oid=6398077&loc=d3e12565-110249

+ Details

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Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Represents the aggregate increase in the liability for accruals related to standard and extended product warranties issued during the reporting period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 460

-SubTopic 10

-Section 50

-Paragraph 8

-Subparagraph ((c)(3))

-URI http://asc.fasb.org/extlink&oid=6398077&loc=d3e12565-110249

+ Details

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- Definition

Amount as of the balance sheet date of the aggregate standard product warranty liability. Does not include the balance for the extended product warranty liability.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name FASB Interpretation (FIN)

-Number 45

-Paragraph 14

-Subparagraph b

-LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 460

-SubTopic 10

-Section 50

-Paragraph 8

-Subparagraph (c)(1),(c)(5)

-URI http://asc.fasb.org/extlink&oid=6398077&loc=d3e12565-110249

+ Details

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Period Type:	instant