<SEC-DOCUMENT>0001019056-16-001618-index.html : 20161104
<SEC-HEADER>0001019056-16-001618.hdr.sgml : 20161104
<ACCEPTANCE-DATETIME>20161104161525
ACCESSION NUMBER:		0001019056-16-001618
CONFORMED SUBMISSION TYPE:	SC 13G/A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20161104
DATE AS OF CHANGE:		20161104
GROUP MEMBERS:		NEIL GAGNON

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-58091
		FILM NUMBER:		161975333

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		978-253-6200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			GAGNON NEIL
		CENTRAL INDEX KEY:			0001070170

	FILING VALUES:
		FORM TYPE:		SC 13G/A
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G/A
<SEQUENCE>1
<FILENAME>rudolph_13ga3.htm
<DESCRIPTION>SC 13G/A
<TEXT>
Document 1 - file: rudolph_13ga3.htm

</DOCUMENT>
</SEC-DOCUMENT>